Ion Damage Overrides Structural Disorder in Silicon Surface Nanopatterning by Low-Energy Ion Beam Sputtering

AuthID
 P-00A-AMX
8
Author(s)
Moreno Barrado, A
·
Gago, R
·
Vazquez, L
·
Munoz Garcia, J
·
Cuerno, R
·
Castro, M
Document Type
Article
Year published
2015
Published
in EPL, ISSN: 0295-5075
Volume: 109, Issue: 4
Indexing
Wos®
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84924898008
Wos: WOS:000351955600023
Source Identifiers
ISSN: 0295-5075
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