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A System Based on Capacitive Interfacing of Cmos With Post-Processed Thin-Film Mems Resonators Employing Synchronous Readout for Parasitic Nulling

AuthID
P-00A-ATY

Author(s)

Huang, LC

Rieutort Louis, W

Gualdino, A

Teagno, L

Hu, YZ

Mouro, J

Sanz Robinson, J

Sturm, JC

Wagner, S

Chu, V

Conde, JP

Verma, N

Document Type

Article

Year published

2015

Published

in IEEE JOURNAL OF SOLID-STATE CIRCUITS, ISSN: 0018-9200

Volume: 50, Issue: 4, Pages: 1002-1015 (14)

Conference

28Th Symposium on Vlsi Circuits, Date: JUN 10-13, 2014, Location: Honolulu, HI, Sponsors: IEEE Solid State Circuits Soc, Japan Soc Appl Phys, Inst Elect, Informat & Commun Engineers, IEEE Electron Devices Soc

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Publication Identifiers

DOI: 10.1109/jssc.2014.2380440

Scopus: 2-s2.0-84926434794

Wos: WOS:000352156000016

Source Identifiers

ISSN: 0018-9200

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A System Based on Capacitive Interfacing of Cmos With Post-Processed Thin-Film Mems Resonators Employing Synchronous Readout for Parasitic Nulling

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A System Based on Capacitive Interfacing of Cmos With Post-Processed Thin-Film Mems Resonators Employing Synchronous Readout for Parasitic Nulling

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