Structural Analysis of Ti1-Xsixny Nanocomposite Films Prepared by Reactive Magnetron Sputtering

AuthID
P-001-31N
7
Author(s)
·
Pacaud, J
·
Riviere, JP
·
Document Type
Article
Year published
1999
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 120, Pages: 166-172 (7)
Conference
26Th International Conference on Metallurgical Coating and Thin Films, Date: APR 12-15, 1999, Location: SAN DIEGO, CALIFORNIA, Sponsors: Div Amer Vacuum Soc, Vacuum Metallurgy & Thin Films
Indexing
Publication Identifiers
Scopus: 2-s2.0-0033504658
Wos: WOS:000084051900025
Source Identifiers
ISSN: 0257-8972
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