in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 147, Issue: 1-4, Pages: 244-248 (5)
Conference
Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society, Date: JUN 16-19, 1998, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc
