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Strain Compensation by Heavy Boron Doping in Si1-Xgex Layers Grown by Solid Phase Epitaxy
AuthID
P-001-B57
8
Author(s)
Rodriguez, A
·
Rodriguez, T
·
SanzHervas, A
·
Kling, A
·
Soares, JC
·
daSilva, MF
·
Ballesteros, C
·
Gwilliam, RM
Document Type
Article
Year published
1997
Published
in
JOURNAL OF MATERIALS RESEARCH,
ISSN: 0884-2914
Volume: 12, Issue: 7, Pages: 1698-1705 (8)
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Publication Identifiers
DOI
:
10.1557/jmr.1997.0234
Scopus
: 2-s2.0-0031186554
Wos
: WOS:A1997XJ19400007
Source Identifiers
ISSN
: 0884-2914
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