Microcrystalline Silicon Thin-Films Prepared By Rf Reactive Magnetron Sputter-Deposition

AuthID
P-001-FZJ
5
Author(s)
FERREIRA, JA
·
DASILVA, MF
Document Type
Article
Year published
1995
Published
in VACUUM, ISSN: 0042-207X
Volume: 46, Issue: 12, Pages: 1385-1390 (6)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0029600563
Wos: WOS:A1995RU41800007
Source Identifiers
ISSN: 0042-207X
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.