Planar Magnetron Glow-Discharge On Copper - Empirical And Semiempirical Relations

AuthID
 P-001-K4P
3
Author(s)
ESCRIVAO, ML
·
MANEIRA, MJP
Document Type
Article
Year published
1994
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 12, Issue: 3, Pages: 723-726 (4)
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Publication Identifiers
Scopus: 2-s2.0-21344483404
Wos: WOS:A1994NL92500016
Source Identifiers
ISSN: 0734-2101
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