Production And Characterization Of Si-N Films Obtained By Rf Magnetron Sputtering

AuthID
 P-001-MJP
3
Author(s)
OLIVEIRA, A
·
Tipo de Documento
Article
Year published
1993
Publicado
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 60, Número: 1-3, Páginas: 463-467 (5)
Conference
3Rd International Conf On Plasma Surface Engineering, Date: OCT 26-29, 1992, Location: GARMISCH PARTENKIR, GERMANY
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Publication Identifiers
SCOPUS: 2-s2.0-0027912371
Wos: WOS:A1993MD49900017
Source Identifiers
ISSN: 0257-8972
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