Structure and Chemical Composition of W-C-(Co) Sputtered Films

AuthID
 P-00H-658
3
Author(s)
Vieira, M
·
Lemperière, G
Document Type
Article
Year published
1991
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 197, Issue: 1-2, Pages: 237-255
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Source Identifiers
ISSN: 0040-6090
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