Mno Counter-Electrode Structure in Ta Capacitors: A Tem Study

AuthID
 P-00H-78Z
4
Author(s)
DIAS, D
·
LOHWASSER, W
Document Type
Article
Year published
2005
Published
in Acta Materialia, ISSN: 1359-6454
Volume: 53, Issue: 17, Pages: 4723-4732
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ISSN: 1359-6454
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