Breakdown of Anomalous Channeling with Ion Energy for Accurate Strain Determination in Gan-Based Heterostructures

AuthID
P-00H-M9X
10
Author(s)
Gago, R
·
Fernández-Garrido, S
·
Smulders, PJM
·
Muñoz, E
·
Calleja, E
·
Watson, IM
·
Document Type
Article
Year published
2009
Published
in Appl. Phys. Lett. - Applied Physics Letters, ISSN: 0003-6951
Volume: 95, Issue: 5, Pages: 051921
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ISSN: 0003-6951
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