Current-Pressure Characteristics of Planar Magnetron Discharges in Rare Gases

AuthID
 P-00H-WX2
5
Author(s)
Escrivão, ML
·
Cabral, MH
·
Teixeira, MR
·
Maneira, MJP
Document Type
Article
Year published
2004
Published
in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films - J. Vac. Sci. Technol. A, ISSN: 0734-2101
Volume: 22, Issue: 6, Pages: 2361
Indexing
Crossref®
Google Scholar®
Publication Identifiers
Source Identifiers
ISSN: 0734-2101
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas instituições

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service