Shape and Thickness Measurements Using a Reconstruction Method for Linear Sensor Microscopy Based on Improvement of Lateral Resolution Isotropy

AuthID
 P-00H-XGW
2
Author(s)
3
Editor(s)
Lehmann, Peter H.; Osten, Wolfgang; Gastinger, Kay
Document Type
Proceedings Paper
Year published
2011
Published
in Optical Measurement Systems for Industrial Inspection VII
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