Determination of the Strain Depth Profile in Solid-Phase Epitaxially Grown Sige Layers Using Rbs/Channeling

AuthID
P-00J-HDN
6
Author(s)
Rodríguez, A
·
Rodríguez, T
·
Soares, J
·
da Silva, M
·
Ballesteros, C
Tipo de Documento
Article
Year published
1998
Publicado
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 136-138, Páginas: 395-399
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Source Identifiers
ISSN: 0168-583X
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