Titanium Oxide Adhesion Layer for High Temperature Annealed Si/Si3N4/Tiox/Pt/Licoo2 Battery Structures

AuthID
P-00K-27D
6
Author(s)
Document Type
Article
Year published
2016
Published
in JOURNAL OF ELECTRONIC MATERIALS, ISSN: 0361-5235
Volume: 45, Issue: 2, Pages: 910-916 (7)
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Publication Identifiers
Scopus: 2-s2.0-84953355862
Wos: WOS:000371167600007
Source Identifiers
ISSN: 0361-5235
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