Full-Gap Tracking System for Parallel Plate Electrostatic Actuators Using Closed-Loop Control

AuthID
P-00K-E5K
6
Author(s)
Moreira, EE
·
Lima, V
·
Gaspar, J
·
Document Type
Article
Year published
2016
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 244, Pages: 174-183 (10)
Indexing
Publication Identifiers
Scopus: 2-s2.0-84964414151
Wos: WOS:000377324000022
Source Identifiers
ISSN: 0924-4247
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