Quantification of the Hysteresis and Related Phenomena in Reactive Hipims Discharges

AuthID
 P-00M-GVY
5
Author(s)
Britun, N
·
Konstantinidis, S
·
Snyders, R
Document Type
Article
Year published
2017
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 121, Issue: 17
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85014561556
Wos: WOS:000400623700007
Source Identifiers
ISSN: 0021-8979
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