Automatic Optical Inspection Of Regular Grid Patterns With An Inspection Camera Used Below The Shannon-Nyquist Criterium For Optical Resolution

AuthID
P-00M-RA4
2
Editor(s)
Soskind, YG; Olson, C
Document Type
Proceedings Paper
Year published
2017
Published
in PHOTONIC INSTRUMENTATION ENGINEERING IV in Proceedings of SPIE, ISSN: 0277-786X
Volume: 10110
Conference
Conference on Photonic Instrumentation Engineering Iv, Date: JAN 31-FEB 02, 2017, Location: San Francisco, CA, Sponsors: SPIE
Indexing
Publication Identifiers
Scopus: 2-s2.0-85018906728
Wos: WOS:000399923700045
Source Identifiers
ISSN: 0277-786X
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