On the Role of the Energetic Species in Tin Thin Film Growth by Reactive Deep Oscillation Magnetron Sputtering in Ar/N-2

AuthID
 P-00N-6NH
4
Author(s)
Document Type
Article
Year published
2018
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 645, Pages: 253-264 (12)
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85032659412
Wos: WOS:000418305200038
Source Identifiers
ISSN: 0040-6090
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