Generic Distortion Model for Metrology Under Optical Microscopes

AuthID
 P-00N-GDX
6
Author(s)
Liu, XJ
·
Li, ZW
·
Zhong, K
·
Chao, YJ
·
Shi, YS
Document Type
Article
Year published
2018
Published
in OPTICS AND LASERS IN ENGINEERING, ISSN: 0143-8166
Volume: 103, Pages: 119-126 (8)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85038023354
Wos: WOS:000423895500014
Source Identifiers
ISSN: 0143-8166
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