Magnesium Metallic Interlayer as an Oxygen-Diffusion-Barrier Between High-Kappa Dielectric Thin Films and Silicon Substrate

AuthID
 P-002-8TT
6
Author(s)
Rauwel, E
·
Ducroquet, F
·
Sunding, MF
·
Matko, I
·
Tipo de Documento
Article
Year published
2012
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 520, Número: 17, Páginas: 5602-5609 (8)
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-84861800114
Wos: WOS:000305770200021
Source Identifiers
ISSN: 0040-6090
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