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A Large-Volume N-2-Ar Microwave Plasma Source Based on Surface Waves
AuthID
P-000-7RW
4
Author(s)
Ferreira, CM
·
Tatarova, E
·
Henriques, J
·
Dias, FM
1
Editor(s)
Guerassimov N.Karpozov D.
Document Type
Article
Year published
2004
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 76, Issue: 2-3, Pages: 343-346 (4)
Conference
13Th International Summer School on Vacuum, Electron and Ion Technologies,
Date:
SEP 15-19, 2003,
Location:
Varna, BULGARIA,
Sponsors:
Bulgarian Acad Sci, Inst Elect, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, FZR, Fdn Evrika
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Publication Identifiers
DOI
:
10.1016/j.vacuum.2004.07.024
Scopus
: 2-s2.0-7044239172
Wos
: WOS:000224890100052
Source Identifiers
ISSN
: 0042-207X
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