Improve Simulation Tool Integrating Heterogeneous Simulation Modules for Semiconductor Manufacturing Processes

AuthID
 P-002-FA7
3
Author(s)
Almeida, N
·
Pires, J
·
Tipo de Documento
Proceedings Paper
Year published
2012
Publicado
in 2012 23RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) in Advanced Semiconductor Manufacturing Conference and Workshop-Proceedings, ISSN: 1078-8743
Páginas: 170-174 (5)
Conference
23Rd Annual Semi Advanced Semiconductor Manufacturing Conference (Asmc), Date: MAY 15-17, 2012, Location: Saratoga Springs, NY, Patrocinadores: Appl Mat, ATMI, CH2MHILL, ChemTrace Analyt Testings & Solut, CNW, Edwards, Greene Tweed, Mentor Graph, KLA Tencor, Nikon, NY Nanotech, Synopsys, Valqua Amer Inc, Saratoga Convent & Tourism Bur, Saratoga Econom Dev Corp (SEDC), IEEE, IEEE, Elect Devices Soc (EDS), IEEE, Components, Packaging & Mfg Technol Soc (CPMT)
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Publication Identifiers
SCOPUS: 2-s2.0-84863908312
Wos: WOS:000309051400034
Source Identifiers
ISSN: 1078-8743
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