Low Peak Power Deposition Regime in Hipims: Deposition of Hard and Dense Nanocomposite Ti-Si-N Films by Doms Without the Need of Energetic Bombardment

AuthID
 P-00S-8BE
5
Author(s)
Calderon, VS
·
Document Type
Article
Year published
2020
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 397
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85085840337
Wos: WOS:000543496400029
Source Identifiers
ISSN: 0257-8972
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