Correlation Between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas

AuthID
 P-00S-WYW
6
Author(s)
Document Type
Article
Year published
2020
Published
in COATINGS, ISSN: 2079-6412
Volume: 10, Issue: 10
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85092659810
Wos: WOS:000584184100001
Source Identifiers
ISSN: 2079-6412
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