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Sputter Deposition of Thin Films on Different Substrate Materials Analyzed by Means of Modulated Ir Radiometry

AuthID
P-002-PM2

Author(s)

Macedo, F

Chotikaprakhan, S

Kijamnajsuk, P

Vaz, F

Faria, RT

Gibkes, J

Pelzl, J

Bein, BK

Tipo de Documento

Article

Year published

2011

Publicado

in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972

Volume: 205, Número: SUPPL. 2, Páginas: S204-S208 (5)

Conference

12Th International Conference on Plasma Surface Engineering, Date: SEP 13-17, 2010, Location: Garmisch-Partenkirchen, GERMANY

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Metadata
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Publication Identifiers

DOI: 10.1016/j.surfcoat.2011.03.038

Handle: https://hdl.handle.net/1822/17115

SCOPUS: 2-s2.0-79959798634

Wos: WOS:000293258600043

Source Identifiers

ISSN: 0257-8972

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Sputter Deposition of Thin Films on Different Substrate Materials Analyzed by Means of Modulated Ir Radiometry

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Sputter Deposition of Thin Films on Different Substrate Materials Analyzed by Means of Modulated Ir Radiometry

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