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Auto-Calibration of Capacitive Mems Accelerometers Based on Pull-In Voltage
AuthID
P-002-TEP
5
Author(s)
Rocha, LA
·
Dias, RA
·
Cretu, E
·
Mol, L
·
Wolffenbuttel, RF
Document Type
Article
Year published
2011
Published
in
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
ISSN: 0946-7076
Volume: 17, Issue: 3, Pages: 429-436 (8)
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DOI
:
10.1007/s00542-011-1252-8
Scopus
: 2-s2.0-84856294112
Wos
: WOS:000289442600014
Source Identifiers
ISSN
: 0946-7076
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