Piezoelectric Aluminum Nitride Thin-Films: A Review of Wet and Dry Etching Techniques

AuthID
 P-00W-M22
5
Author(s)
Gund, V
·
Calaza, C
·
Nagaraja, KK
·
Vinayakumar, KB
Document Type
Review
Year published
2022
Published
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 257
Indexing
Wos®
Google Scholar®
Publication Identifiers
Wos: WOS:000787887300002
Source Identifiers
ISSN: 0167-9317
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