Mems Resonators with Electrostatic Actuation and Piezoresistive Readout for Sensing Applications

AuthID
 P-00X-2ZQ
4
Author(s)
Document Type
Article
Year published
2022
Published
in MICRO AND NANO ENGINEERING
Volume: 16
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Publication Identifiers
Scopus: 2-s2.0-85135966883
Wos: WOS:000861203500001
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