Multilayer Thin-Film Coatings Based on Chromium Nitride and Aluminum Nitride: Comparative Depth Profiling by Secondary Ion Mass Spectrometry and Glow-Discharge Optical Emission Spectrometry

AuthID
 P-003-0KB
1
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Document Type
Article
Year published
2010
Published
in JOURNAL OF ANALYTICAL CHEMISTRY, ISSN: 1061-9348
Volume: 65, Issue: 13, Pages: 1370-1376 (7)
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Scopus: 2-s2.0-78650506553
Wos: WOS:000284905400010
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ISSN: 1061-9348
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