Optimization and Thermal Stability of Tialn/Mo Multilayers

AuthID
 P-000-18P
6
Author(s)
Riviere, JP
·
Le Bourhis, E
·
Denanot, MF
Document Type
Article
Year published
2005
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 200, Issue: 1-4, Pages: 288-292 (5)
Conference
9Th International Conference on Plasma Surface Engineering, Date: SEP 13-17, 2004, Location: Garmisch Partenkirchen, GERMANY, Sponsors: European Joint Comm Plasma & Ion Surface Engn
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Publication Identifiers
Scopus: 2-s2.0-24644455944
Wos: WOS:000232327800064
Source Identifiers
ISSN: 0257-8972
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