Role of the Rf Power on the Structure of Defects in A-Si : H Films Produced by Pecvd

AuthID
 P-000-XQ9
8
Author(s)
Subrahmanyam, VS
·
Gil, CL
·
de Lima, AP
·
3
Editor(s)
Triftshauser,W;Kogel,G;Sperr,P
Document Type
Article
Year published
2001
Published
in POSITRON ANNIHILATION - ICPA-12 in Materials Science Forum, ISSN: 0255-5476
Volume: 363-3, Pages: 454-456 (3)
Conference
12Th International Conference on Positron Annihilation (Icpa-12), Date: AUG 06-12, 2000, Location: NEUBIBERG, GERMANY, Sponsors: Univ Bundeswehr Munchen, Verein Freunde, Deutsch Forsch Gemeinschaft, Bayerisches Staatsminist Wissensch Kunst, Gemeinde Neubiberg, Fremdenverkehrsamt Stadt Munchen, Canberra Packard Gmbh, Chemotrade Gmbh, Deutsch Bank 24, FAST ComTec GmbH, Gen Lloyd Versicherungs AG, Heiden Electr, Korth Kristalle GmbH, Leybold Vakuum GmbH, Pantolsky KG Apparatebau, Siemens Gebaudetech, Tektronix GmbH, Varian GmbH, Host: UNIV BUNDERSWEHR MUNCHEN
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Publication Identifiers
Scopus: 2-s2.0-0035000395
Wos: WOS:000170202400130
Source Identifiers
ISSN: 0255-5476
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