Excimer Laser-Assisted Cleaning of Single-Crystal Silicon Wafers Contaminated with Metallic Particles

AuthID
 P-000-Y1H
5
Author(s)
Neves, P
·
Arronte, M
·
Document Type
Proceedings Paper
Year published
2001
Published
in 20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS
Pages: 1744-1753 (10)
Conference
20Th International Congress on Applications of Lasers and Electro-Optics (Icaleo 2001), Date: OCT 14-18, 2001, Location: JACKSONVILLE, FL, Sponsors: Laser Inst Amer
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Wos: WOS:000177444200192
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