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Ion Implantation of Microcrystalline Silicon for Low Process Temperature Top Gate Thin Film Transistors

AuthID
P-001-59C

Author(s)

Chu, V

Silva, H

Document Type

Article

Year published

1999

Published

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 337, Issue: 1-2, Pages: 203-207 (5)

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Publication Identifiers

DOI: 10.1016/s0040-6090(98)01177-8

Scopus: 2-s2.0-0346206462

Wos: WOS:000078353300047

Source Identifiers

ISSN: 0040-6090

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Ion Implantation of Microcrystalline Silicon for Low Process Temperature Top Gate Thin Film Transistors

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Ion Implantation of Microcrystalline Silicon for Low Process Temperature Top Gate Thin Film Transistors

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