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Two-Dimensional Modelling of Sih4-H-2 Radio-Frequency Discharges for A-Si : H Deposition
AuthID
P-001-7DW
5
Author(s)
Leroy, O
·
Gousset, G
·
Alves, LL
·
Perrin, J
·
Jolly, J
Document Type
Article
Year published
1998
Published
in
PLASMA SOURCES SCIENCE & TECHNOLOGY,
ISSN: 0963-0252
Volume: 7, Issue: 3, Pages: 348-358 (11)
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Publication Identifiers
DOI
:
10.1088/0963-0252/7/3/013
SCOPUS
: 2-s2.0-0032142090
Wos
: WOS:000075608000012
Source Identifiers
ISSN
: 0963-0252
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