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Identification of Fatigue Crack Extension Process in Zero-Tension Cyclic Stress Test of Polysilicon Films

AuthID
P-008-3NV

Author(s)

Le Huy, V

Kamiya, S

Gaspar, J

Paul, O

Document Type

Proceedings Paper

Year published

2012

Published

in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN: 1084-6999

Pages: 440-443

Conference

2012 Ieee 25Th International Conference on Micro Electro Mechanical Systems, Mems 2012, Date: 29 January 2012 through 2 February 2012, Location: Paris, Sponsors: Robotics and Automation Society;IEEE;Region Nord-Pas de Calais

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Publication Identifiers

DOI: 10.1109/memsys.2012.6170168

Scopus: 2-s2.0-84860432494

Source Identifiers

ISSN: 1084-6999

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Identification of Fatigue Crack Extension Process in Zero-Tension Cyclic Stress Test of Polysilicon Films

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