A Full-System Dynamic Model for Complex Mems Structures

AuthID
 P-008-PDP
3
Author(s)
2
Editor(s)
Laudon, M; Romanowicz, B
Document Type
Proceedings Paper
Year published
2004
Published
in NSTI NANOTECH 2004, VOL 2, TECHNICAL PROCEEDINGS
Pages: 203-206 (4)
Conference
Nanotechnology Conference and Trade Show (Nanotech 2004), Date: MAR 07-11, 2004, Location: Boston, MA, Sponsors: Nano Sci & Technol Inst, Intel Corp, Motorola, Texas Instruments, Ciphergen Biosyst Inc, iMediasoft Grp, Frontier Carbon Corp, Veeco Instruments, Hitachi High Technologies Amer Inc, Racepoint Grp Inc, Int SEMATECH, FEI Co, Keithley, St Gobain High Performance Mat, Zyvex Corp, Accelrys, ANSYS Inc, Atomistix, PolyInsight, GA Dept Ind & Trade, Swiss Business Hub USA, Australian Govt, Invest Australia, State Bavaria, Germany, United States Off Econ Dev, m+w zander, Engis Corp, COMSOL, Engelhard Corp, Nanonex Inc, nanoTITAN, Tegal Corp, Umech Technologies, MEMSCAP, Swiss House Adv Res & Educ SHARE, Basel Area Business, Dev, Dev Econ Western Switzerland, Nanoworld AG, Nanosensors, Nanofair, Burns, Doane, Swecker & Mathis, LLP, Mintz Levin Cohn Ferris Glovsky & Popeo, PC, Jackson Walker LLP, Greater Zurich Area
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Wos: WOS:000223076800048
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