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The Role Of The Species Formed In Pecvd Systems On The Density Of States Of A-Si-H Films

AuthID
P-008-T0P

Author(s)

MARTINS, R

RODRIGUES, L

VIEIRA, M

FORTUNATO, E

SANTOS, M

DIRANI, E

CARVALHO, N

BAIA, I

GUIMARAES, L

Editor(s)

TAYLOR, PC; THOMPSON, MJ; LECOMBER, PG; HAMAKAURA, Y; MADAN, A

Document Type

Proceedings Paper

Year published

1990

Published

in AMORPHOUS SILICON TECHNOLOGY - 1990 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume: 192, Pages: 175-180 (6)

Conference

Symp At The 1990 Spring Meeting Of The Materials Research Soc : Amorphous Silicon Technology, Date: APR 17-20, 1990, Location: SAN FRANCISCO, CA, Sponsors: MAT RES SOC

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Publication Identifiers

DOI: 10.1557/proc-192-175

Wos: WOS:A1990BS15Y00026

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