Structural Analysis of Nanocrystalline Sic Thin Films Grown on Silicon by Ecr Plasma Cvd

AuthID
 P-009-2V2
5
Author(s)
Toal, SJ
·
Document Type
Article
Year published
1999
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 343, Issue: 1-2, Pages: 292-294 (3)
Conference
14Th International Vacuum Congress/10Th International Conference on Solid Surfaces/5Th International Conference on Nanometre-Scale Science and Technology/10Th International Conference on Quantitative Surface Analysis, Date: AUG 31-SEP 04, 1998, Location: BIRMINGHAM, ENGLAND, Sponsors: British Vacuum Council, Inst Phys, Int Union Vacuum Sci Tech & Applicat
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Publication Identifiers
Scopus: 2-s2.0-0032628698
Wos: WOS:000081103100077
Source Identifiers
ISSN: 0040-6090
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