High-Resolution Auger Depth Profiling Of Multilayer Structures Mo/Si, Mo/B4C, Ni/C

AuthID
 P-00F-NCH
5
Author(s)
ANDREEV, SS
·
AKHSAKHALYAN, AD
·
DROZDOV, MN
·
SALASHCHENKO, NN
Document Type
Article
Year published
1995
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 263, Issue: 2, Pages: 169-174 (6)
Indexing
Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-0029346345
Wos: WOS:A1995RM78300007
Source Identifiers
ISSN: 0040-6090
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