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Direct Evidence For Substitutional Li After Ion-Implantation Into Highly Phosphorus-Doped Si
AuthID
P-00F-QHD
5
Author(s)
WAHL, U
·
HOFSASS, H
·
JAHN, SG
·
WINTER, S
·
RECKNAGEL, E
Document Type
Article
Year published
1993
Published
in
APPLIED PHYSICS LETTERS,
ISSN: 0003-6951
Volume: 62, Issue: 7, Pages: 684-686 (3)
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Wos
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Scopus
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®
Metadata
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Publication Identifiers
DOI
:
10.1063/1.108839
Scopus
: 2-s2.0-0342987154
Wos
: WOS:A1993KL87800008
Source Identifiers
ISSN
: 0003-6951
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