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Additional Control of Bombardment by Deep Oscillation Magnetron Sputtering: Effect on the Microstructure and Topography of Cr Thin Films
AuthID
P-00M-A6J
4
Author(s)
Ferreira, F
·
Serra, R
·
Cavaleiro, A
·
Oliveira, JC
Document Type
Article
Year published
2016
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 619, Pages: 250-260 (11)
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Wos
®
Scopus
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Crossref
®
20
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®
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Publication Identifiers
DOI
:
10.1016/j.tsf.2016.10.054
Scopus
: 2-s2.0-84997701235
Wos
: WOS:000389610900037
Source Identifiers
ISSN
: 0040-6090
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