Publications

Identification Of Fatigue Crack Extension Process In Zero-Tension Cyclic Stress Test Of Polysilicon Films

AuthID
P-00P-6Y2

Author(s)

Huy, VL

Kamiya, S

Gaspar, J

Paul, O

Document Type

Proceedings Paper

Year published

2012

Published

in 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999

Conference

25Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 29-FEB 02, 2012, Location: Paris, FRANCE, Sponsors: IEEE, Robot & Automat Soc (RA), Reg Nord-Pas Calais

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