Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates

AuthID
 P-00R-1E9
7
Author(s)
Pestana, TG
·
Pinto, RMR
·
Dias, RA
·
Martins, M
·
Gaspar, J
·
Document Type
Proceedings Paper
Year published
2019
Published
in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Pages: 2539-2542
Conference
20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Sponsors: Electron Devices Society (EDS);Hahn-Schickard;IEEE
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Scopus: 2-s2.0-85071920394
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