Lithographic Mask Defects Mitigation on a Multimode Interference Structure

AuthID
 P-00T-2T6
4
Author(s)
Lourenço, P
·
Fantoni, A
·
Costa, J
·
Document Type
Article
Year published
2020
Published
in Optica Pura y Aplicada, ISSN: 0030-3917
Volume: 53, Issue: 3, Pages: 1-11
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85096342957
Source Identifiers
ISSN: 0030-3917
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