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Nanoimprint Lithography for Grayscale Pattern Replication of Mems Mirrors in a 200 Mm Wafer
AuthID
P-010-1YQ
10
Author(s)
Garcia, IS
·
Retolaza, A
·
Ferreira, C
·
Silva, C
·
Aguiam, DE
·
Alves, FS
·
Sousa, PC
·
Dias, RA
·
Cabral, J
·
Gaspar, J
Document Type
Article
Year published
2024
Published
in
JOURNAL OF MANUFACTURING PROCESSES,
ISSN: 1526-6125
Volume: 116, Pages: 202-209 (8)
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Publication Identifiers
DOI
:
10.1016/j.jmapro.2024.02.039
Scopus
: 2-s2.0-85186269836
Wos
: WOS:001202888000001
Source Identifiers
ISSN
: 1526-6125
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