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Quantification of the Sp3 Content in Diamond-Like Carbon Films: Effects of Ne Plasma Addition in Deep Oscillation Magnetron Sputtering

AuthID
P-010-P3J

Author(s)

Oliveira, JC

Vahidi, A

Ferreira, F

Serra, R

Cavaleiro, A

Document Type

Article

Year published

2024

Published

in APPLIED SURFACE SCIENCE, ISSN: 0169-4332

Volume: 669, Pages: 160565 (12)

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Wos^®

Scopus^®

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Publication Identifiers

DOI: 10.1016/j.apsusc.2024.160565

Scopus: 2-s2.0-85196521093

Wos: WOS:001339147600001

Source Identifiers

ISSN: 0169-4332

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Quantification of the Sp3 Content in Diamond-Like Carbon Films: Effects of Ne Plasma Addition in Deep Oscillation Magnetron Sputtering

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Quantification of the Sp3 Content in Diamond-Like Carbon Films: Effects of Ne Plasma Addition in Deep Oscillation Magnetron Sputtering

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