Effect of Annealing on Al Diffusion and Its Impact on the Properties of Ga2O3 Thin Films Deposited on C-Plane Sapphire by Rf Sputtering

AuthID
 P-018-K0S
7
Author(s)
Sousa, AS
·
Esteves, M
·
Robalo, T
·
Rodrigues, S
·
Peres, M
Document Type
Article
Year published
2025
Published
in Physica Status Solidi - Rapid Research Letters, ISSN: 1862-6254
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Publication Identifiers
Scopus: 2-s2.0-105002455178
Source Identifiers
ISSN: 1862-6254
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