Impact of C4F8 Based Anti-Sticking Layers for High-Resolution Nanoimprint Lithography Processes

AuthID
 P-01B-0AM
14
Author(s)
Lopes, T
·
Lopes, TS
·
Monteiro, M
·
Violas, A
·
Oliveira, AJN
·
Curado, MA
·
Ferreira, B
·
Alexandre, RF
·
Ribeiro, EJ
·
Teixeira, JP
·
Brammertz, G
·
Vermang, B
·
Salomé, PMP
Document Type
Unpublished
Year published
2023
Published
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