F. Yubero
AuthID: R-00G-PG0
1
TITLE: Room temperature synthesis of porous SiO2 thin films by plasma enhanced chemical vapor deposition
AUTHORS: Barranco, A; Cotrino, J; Yubero, F; Espinos, JP; Gonzalez Elipe, AR;
PUBLISHED: 2004, SOURCE: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, VOLUME: 22, ISSUE: 4
AUTHORS: Barranco, A; Cotrino, J; Yubero, F; Espinos, JP; Gonzalez Elipe, AR;
PUBLISHED: 2004, SOURCE: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, VOLUME: 22, ISSUE: 4
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